AFM, SPM, STM, SEM, LFM, MFM, EFM, Atomic Force Microscope, Atomic Force Microscopy, Scanning Probe Microscope, Scanning Microscopy, Scanning Electron Microscope, Scanning Electron Microscopy, Lateral Force Microscope, Lateral Force Microscopy, Magnetic Force Microscope, Magnetic Force Microscopy, Electrostatic force microscopy, Electrostatic force microscope, Environmental Control SPM, Scanning Tunneling Microscope, Scanning Tunneling Microscopy

 

 

AA8000 Multi-function Scanning Electron Microscopy System

Introductions
Angstrom Advanced AA8000 is a true multi-purpose, multi-user Scanning Electron Microscope(SEM). It excels in versatility and flexibility by combining high performance in all SEM modes & Particle counter with ease of operation in a multi-user material research environment. The AA8000 Scanning Electron Microscope features a perfect balance between stable configuration and an excellent resolution. The AA8000 Scanning Electron Microscope has state-of-art SEM technology. Its rock-solid reliability and fully automated control functions provide customer with the maximum analytical capability. Angstrom AA8000 SEM pursues compact SEM design which is great for office environment. Angstrom AA8000 SEM provides high scan speed and pixel resolution and high performance control driver with new PCI board. A full set of automated image adjustment functions make it easy for new users to quickly acquire crisp, noise-free images. Even experienced users will benefit from the automated contrast, brightness and focus.
Features

High Performance

  • Field proven image quality
  • Upgraded scan speed and pixel resolution.
  • Wide variety of optional instrument
  • Resolution : 3.0 nm
  • Magnification : ~1,000,000X
  • Display : Photo 4096X 4096
  • Search : 640X480 30fps
  • Options : BSE / WDS / EDS / EBSD / Etc.

Gun Coumn

  • Gun design for stable current supply
  • Dual field objective lens for spherical
  • Aberration reduction
  • Movable aperture for beam centering
  • Upgraded design of magnetic lens (CL/OL)

Chamber & Stage

  • 5 axis eucentric stage
  • Option: Stage motorization
  • EDS,WDS,CCD, Manipulator etc
  • 50X60X57mm

Detector

  • ET-bar type SE detector
  • SE & BSE double image mode
  • Option: BSE detector

GUI

  • Window based GUI
  • PC controlled operation
  • Image thumbnail & storage
  • Parameter Display

Vacuum System

  • Automatic & Manual control
  • Automatic Safety System
  • R.P+D.P/ R.P+TMP

Image Analyzer

  • Data transfer to Excel
  • Particle counter for blob analysis
  • Multi-focusing & Tiling
  • 3D data view etc

Specifications

Z ELECTRON OPTIC SYSTEM

 

Resolution

3.0 nm @30KeV SE/ 4.0nm @BSE

 Magnification

10 ~ 1,000,000X

Image

Color Optical Microscope Image (Option)

Beam Scan Mode

Search, Inspection, Photo (3step)

Accelerating Voltage

0.5kV~30kV

Electron Gun Type

Tungsten Filament

Bias System

Linked with Acc. Voltage plus continuous voltage control

Gun Alignment

Pre-centered cartridge

Condenser Lens

Electromagnetic 2 stages

Objective Lens

Electromagnetic 1 stages

Stigmator

8 Pole Electromagnetic Type

Detector

Bar Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection)

Image Shift

4 Pole Electromagnetic Type

Automation Function

Auto-Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current etc.

 

DISPLAY

 

Frame Memory &Scan

Search (640X480) >30 frame/s

Inspection (1280X960)  30 frame/s

Photo(4096X4096)  2 frame/s

 

IMAGE ANALYZER

 

Image Analyzer Particle Counter

Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/Filters/ Blob Analysis (Single/Multiple/Grouping), Histogram, Excel Data, Point Measurement

 

STAGE SYSTEM

 

Movement (X/Y/Z) mm

60/70/65mm

Tilt

-20~60° (Max 90 °)

Rotation

360°

Stage Motorization

X,Y,R (Standard) X,Y,Z,Tilt,Rotation (Option)

 

 

VACUUM SYSTEM

 

Vacuum Control Type

Full automation with safety system

Vacuum System

Rotary Pump + Diffusion Pump or Rotary Pump + Turbo Pump (Option)

 

CONTROL SYSTEM

 

Computer System

Intel Pentium 4(Dual Co-Processor)

Memory

≥ 256MB, Control Data Interface

Operation System

Image Acquisition